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The present invention relates to a technique for forming and arranging a pattern on a substrate.
2. Description of the Related Art
Processing techniques for manufacturing semiconductor devices with a semiconductor substrate have reached the limits of the conventional processing methods. Increasing the degree of integration of semiconductor devices has led to demands for even finer pattern processing and higher resolution. The shapes of the patterns formed on substrates are now required to be formed with resolutions far finer than ever before.
However, as resolutions of patterns fall into the sub-micron order, the influences of random dust, that is, a defect that serves as a cause of a circuit defect, and a resist film defect become increasingly large. In particular, dust tends to stick to edges of patterns.
This makes it necessary to develop a technique for forming patterns that allows dust to be removed at the time of processing (for example, etching), that allows dust to be dispersed to avoid dust adhering to edges of the patterns, and that allows the formation of patterns without contaminating an ambient atmosphere.Manchester United’s 1,800-strong youth team and its manager have been handed an honorary knighthood after a public vote.
Chris Maxwell, manager of United’s Academy of Light since its inception in August 2010, was named Sir Chris Maxwell after a public vote on the club’s website. United also held a voting campaign on the academy’s official Facebook page.
United paid tribute to the academy on its official Twitter account, offering an apology to Sir Bobby Charlton, who did not stand for himself this year. It is the first time United has honoured the former England captain. Charlton was made an MBE in 1969 and awarded the Freedom of the City of Manchester last year.
Dave Unsworth, United’s academy director, said: “We are delighted to honour Sir Bobby Charlton with an honorary knighthood after his long and distinguished career. It is something he